State Research Center OPTIMAS

Prof. Dr. Michael Kopnarski

Institute for Surface and Thin Film Analysis (IFOS)
Trippstadter Strasse 120
67663 Kaiserslautern

Room 3.24

Phone: +49 631 20573 3000
Fax: +49 631 20573 3003
E-mail: kopnarski(a)

Research Fields

Instrumental surface and thin film analysis: chemical, structural and topographical characterisation of surfaces, thin films and solids in the areas of optics, chemistry and material science, microelectronics, storage technology and tribology. Instrumenation: Atompobe tomography, Electron microscopy (SEM, TEM, FIB); Electron spectroscopy (AES, XPS); Mass spectrometry; X-Ray Analysis ); scanning probe analysis  and others

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